Specific Process Knowledge/Characterization/XPS: Difference between revisions
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In the XPS spectrometer system the probed samples are irradiated by photons with a specific energy, and the photoelectrons that leaves the sample are detected. The energy levels of the electrons are elemental specific, and by measuring the energy of the outgoing electrons, it is possible to detect which elements that are present in a sample. | In the XPS spectrometer system the probed samples are irradiated by photons with a specific energy, and the photoelectrons that leaves the sample are detected. The energy levels of the electrons are elemental specific, and by measuring the energy of the outgoing electrons, it is possible to detect which elements that are present in a sample. | ||
[[image:Overview spectra Labadvisor.JPG|300x300px|right|thumb|XPS Si2p spectrum of Si sample]] | |||
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''XPS technique'' | |||