Specific Process Knowledge/Characterization/XPS: Difference between revisions
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==Elemental analysis== | ==Elemental analysis== | ||
The XPS technique can be used to do elemental analysis. A comparision about techniques and intsrumens used for elemental analysis at Danchip can be found on the page [[Specific Process Knowledge/Characterization/Element analysis|Element analysis]]. | The XPS technique can be used to do elemental analysis. A comparision about techniques and intsrumens used for elemental analysis at Danchip can be found on the page [[Specific Process Knowledge/Characterization/Element analysis|Element analysis]]. | ||
==XPS technique== | |||
XPS is a surface sensitive and non destructive technique used for elemental composition analysis. | |||