Specific Process Knowledge/Characterization/XPS: Difference between revisions
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Flood gun can be used for charge compensation of non conductive samples | Flood gun can be used for charge compensation of non conductive samples | ||
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|style="background:LightGrey; color:black"|Finding structures | |||
|style="background:WhiteSmoke; color:black"|Choose measuring spot from camera image | |||
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|style="background:LightGrey; color:black"|Ion beam size | |style="background:LightGrey; color:black"|Ion beam size | ||
|style="background:WhiteSmoke; color:black"| About 0, | |style="background:WhiteSmoke; color:black"| About 0,3x1 mm | ||
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