Specific Process Knowledge/Characterization/XPS: Difference between revisions

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 |style="background:LightGrey; color:black"|Resolution
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+|style="background:WhiteSmoke; color:black"|Dependent on probed elements. Concentrations down to about 0,5 atomic % can in some cases be detected.
- µm
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 |style="background:LightGrey; color:black"|Charge compensation
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-Å,  )
+Flood gun can be used for charge compensation of non conductive samples
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 |style="background:LightGrey; color:black"|Substrate size
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-*up
+* Max 60x60 mm
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 | style="background:LightGrey; color:black"|Substrate thickness
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-*hh
+* Max height about 20 mm
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