Specific Process Knowledge/Thin film deposition/Deposition of Silicon: Difference between revisions
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* 4x6" wafers or | * 4x6" wafers or | ||
* 4x4" wafers or | * 4x4" wafers or | ||
* | * 4x2" wafers | ||
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*1-25 wafers of 4" | *1-25 wafers of 4" | ||