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Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide/SiO2 disk and granule source tests in Temescal October 2026: Difference between revisions

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'''Note.''' Main finding: the combined disks-and-granules configuration with sweep #7 is the more promising configuration from these two tests. Because sweep geometry and substrate temperature also changed, the improvement cannot be assigned to the granules alone.


The report follows the experimental sequence using source photographs, schematics, visual observations and instrument recordings. The power curves retain the recorded values without smoothing. Run 1 heating-timer pauses are excluded from the main comparison and are separate from source instability. These exploratory tests document source behaviour and provide a basis for further process development.
The report follows the experimental sequence using source photographs, schematics, visual observations, and instrument recordings. The power curves retain the recorded values without smoothing. Run 1 heating-timer pauses are excluded from the main comparison and are separate from source instability. These exploratory tests document source behavior and provide a basis for further process development.


== Test design and recorded settings ==
== Test design and recorded settings ==
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