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Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions

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danchip
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danchip
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image:Oxide_thickness_vs_time_Dry_oxygen_111.JPG|Dry oxide on <111> wafer
image:Oxide_thickness_vs_time_Dry_oxygen_111.JPG|Dry oxide on <111> wafer
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===Furnace <111>-Si Dry Oxidation===
[[Image:Furnace_111_Si_dry_oxidation.jpg]]
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