Specific Process Knowledge/Lithography/Coaters/Spin Coater: Gamma DUV processing: Difference between revisions
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*[https://labmanager.dtu.dk/d4Show.php?id=5123&mach=279 The QC procedure for Spin coater: Süss Stepper] - '''requires login'''<br> | *[https://labmanager.dtu.dk/d4Show.php?id=5123&mach=279 The QC procedure for Spin coater: Süss Stepper] - '''requires login'''<br> | ||
*[https://labmanager.dtu.dk/view_binary.php? | *[https://labmanager.dtu.dk/view_binary.php?type=data&mach=279 The newest QC data for Spin coater: Süss Stepper] - '''requires login''' | ||
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*[https://labmanager.dtu.dk/d4Show.php?id=5123&mach=279 The QC procedure for Spin coater: Süss Stepper] - '''requires login'''<br> | *[https://labmanager.dtu.dk/d4Show.php?id=5123&mach=279 The QC procedure for Spin coater: Süss Stepper] - '''requires login'''<br> | ||
*[https://labmanager.dtu.dk/view_binary.php? | *[https://labmanager.dtu.dk/view_binary.php?type=data&mach=279 The newest QC data for Spin coater: Süss Stepper] - '''requires login''' | ||
{| {{table}} | {| {{table}} | ||
| align="center" | | | align="center" | | ||