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Specific Process Knowledge/Polymer Processing/Polymer Processing/Coating/Parylene Coater: Difference between revisions

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A parylene coater is the integrated CVD system — vaporiser, pyrolysis furnace, deposition chamber, cold trap, and vacuum system — used to run this process.
A parylene coater is the integrated CVD system — vaporiser, pyrolysis furnace, deposition chamber, cold trap, and vacuum system — used to run this process.
===Chemistry in Brief===
The precursor for each parylene type is a cyclic dimer of the corresponding p-xylylene unit (di-para-xylylene, “DPX,” for Parylene N; the chlorinated dimer for Parylene C; and so on). Heating this solid dimer under vacuum sublimes it directly to a vapour without melting. Pyrolysis at high temperature homolytically cleaves the dimer's two methylene–methylene bonds, producing a pair of reactive p-xylylene monomers (diradicals). These monomers do not react with each other in the gas phase because the chamber is kept cold and dilute; instead, they diffuse to any surface at or near room temperature, adsorb, and rapidly propagate into a linear, high-molecular-weight polymer directly on that surface. There is no solvent, no initiator, and no exotherm large enough to damage typical substrates — polymerisation is driven by the radical reactivity of the monomer itself, not by added chemistry.
Because polymerisation happens directly on the substrate surface rather than in solution, the resulting film has very high molecular weight, high crystallinity (grade-dependent), and essentially no seams, pinholes, or coating-induced stress from solvent evaporation or shrinkage, which is the root reason parylene outperforms liquid coatings as a barrier film.


=== Working Principle ===
=== Working Principle ===