Specific Process Knowledge/Polymer Processing/Polymer Processing/Coating/Parylene Coater: Difference between revisions
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A '''Parylene coater''' is a Chemical Vapour Deposition (CVD) system used to deposit ultra-thin, uniform, and pinhole-free Parylene polymer films on a wide variety of substrates. Unlike conventional liquid coating methods, Parylene coating is performed entirely in the vapour phase under vacuum, allowing the polymer to coat complex three-dimensional structures with excellent conformality. This process is widely used in electronics, medical devices, MEMS, aerospace, automotive, and sensor technologies because of its outstanding dielectric, moisture-barrier, and biocompatibility properties. | A '''Parylene coater''' is a Chemical Vapour Deposition (CVD) system used to deposit ultra-thin, uniform, and pinhole-free Parylene polymer films on a wide variety of substrates. Unlike conventional liquid coating methods, Parylene coating is performed entirely in the vapour phase under vacuum, allowing the polymer to coat complex three-dimensional structures with excellent conformality. This process is widely used in electronics, medical devices, MEMS, aerospace, automotive, and sensor technologies because of its outstanding dielectric, moisture-barrier, and biocompatibility properties. | ||
=== Working Principle === | |||
The Parylene deposition process consists of four main stages: | |||
# '''Sublimation:''' Solid Parylene dimer is heated (approximately '''120–180°C''') under vacuum to produce a vapour. | |||
# '''Pyrolysis:''' The vapour passes through a high-temperature furnace ('''650–750°C'''), where the dimer molecules split into reactive monomers. | |||
# '''Deposition and Polymerisation:''' The monomer enters a slightly heated vacuum chamber containing the substrate. The monomer condenses and polymerises directly on all exposed surfaces, forming a thin, conformal polymer coating. | |||
# '''Cold Trap:''' Residual monomer and by-products are captured in a cryo-cooled cold trap before reaching the vacuum pump. | |||
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A Parylene coater is a Chemical Vapour Deposition (CVD) system used to deposit ultra-thin, uniform, and pinhole-free Parylene polymer films on a wide variety of substrates. Unlike conventional liquid coating methods, Parylene coating is performed entirely in the vapour phase under vacuum, allowing the polymer to coat complex three-dimensional structures with excellent conformality. This process is widely used in electronics, medical devices, MEMS, aerospace, automotive, and sensor technologies because of its outstanding dielectric, moisture-barrier, and biocompatibility properties.
Working Principle
The Parylene deposition process consists of four main stages:
- Sublimation: Solid Parylene dimer is heated (approximately 120–180°C) under vacuum to produce a vapour.
- Pyrolysis: The vapour passes through a high-temperature furnace (650–750°C), where the dimer molecules split into reactive monomers.
- Deposition and Polymerisation: The monomer enters a slightly heated vacuum chamber containing the substrate. The monomer condenses and polymerises directly on all exposed surfaces, forming a thin, conformal polymer coating.
- Cold Trap: Residual monomer and by-products are captured in a cryo-cooled cold trap before reaching the vacuum pump.