Specific Process Knowledge/Etch/Etching of Polymer: Difference between revisions
| Line 41: | Line 41: | ||
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! poly2 | ! poly2 | ||
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| standard resists, PI PMMA | | standard resists, PI PMMA | ||
| 20 | | 20 | ||
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! poly3 | ! poly3 | ||
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| BCB | | BCB | ||
| 43 | | 43 | ||