Specific Process Knowledge/Lithography/UVExposure/aligner MLA3: Difference between revisions
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! scope=row style="text-align: left;" | Dynamic focusing method | ! scope=row style="text-align: left;" | Dynamic focusing method | ||
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! scope=row style="text-align: left;" | Minimum resolution | ! scope=row style="text-align: left;" | Minimum resolution | ||