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Specific Process Knowledge/Lithography/Aligners/MAvsMLA: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,792 edits
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,792 edits
Line 337: Line 337:


==AZ MiR 701==
==AZ MiR 701==
<br clear="all" />
===Resolution (AZ MiR 701)===
===Resolution (AZ MiR 701)===
* Table with optimal parameters and resolution for different aligners
<br clear="all" />
* SEM pictures
'''Resolution at optimal processing conditions for 1.5µm AZ MiR 701 using different exposure equipment:'''
'''Resolution at optimal processing conditions for 1.5µm AZ MiR 701 using different exposure equipment:'''
{| class="wikitable"
{| class="wikitable"
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