Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions
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The [[/Zeiss|Zeiss SEM]] is the newest SEM in the cleanroom. | The [[/Zeiss|Zeiss SEM]] is the newest SEM in the cleanroom. | ||
[[image:SEM-Jeol.jpg|200x200px|right|thumb|The Jeol SEM is located outside the cleanroom in the basement ]] | [[image:SEM-Jeol.jpg|200x200px|right|thumb|The Jeol SEM is located outside the cleanroom in the basement ]] | ||
[[/Jeol|Jeol SEM]] | [[/Jeol|Jeol SEM]] | ||
The less advanced [[/Jeol|Jeol SEM]] offers a great alternative for many types of SEM needs. If you have to check the result of an etch process, a lift-off etc. before you proceed with the process sequence, the [[/Jeol|Jeol SEM]] is a much better choice. It is simple, faster to use, has a very low sample exchange time and is by far more accessible than any of the other SEMs. There is a very good chance that it is free when you need it. On heavily charging polymers such as SU-8 it even does a better job than the Leo SEM. To use it, a 1-2 hour training session is necessary. | |||
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==[[/Leo | Leo SEM]] - ''Leo 1550 '' == | ==[[/Leo | Leo SEM]] - ''Leo 1550 '' == | ||
==[[/Jeol | Jeol SEM]] - ''Jeol JSM 5500 LV '' | ==[[/Jeol | Jeol SEM]] - ''Jeol JSM 5500 LV '' == | ||