Specific Process Knowledge/Lithography/EBeamLithography/Nanobook: Difference between revisions
| Line 4: | Line 4: | ||
In particular, you are holding a version of Moby Dick by Herman Melville that has been shrunk to a minute size and defined by our state of the art Electron Beam Lithography system onto a silicon wafer. Despite a length of roughly 1.300.000 characters (about 650 pages) this version of the book covers an area of just 0.046 mm^2. At this scale it can fit more than 9000 times on one face of a 1 euro coin! It is not a super convenient format for reading since this would require an expensive Scanning Electron Microscope but it demonstrates the scale of modern day semiconductor fabrication techniques. | In particular, you are holding a version of Moby Dick by Herman Melville that has been shrunk to a minute size and defined by our state of the art Electron Beam Lithography system onto a silicon wafer. Despite a length of roughly 1.300.000 characters (about 650 pages) this version of the book covers an area of just 0.046 mm^2. At this scale it can fit more than 9000 times on one face of a 1 euro coin! It is not a super convenient format for reading since this would require an expensive Scanning Electron Microscope but it demonstrates the scale of modern day semiconductor fabrication techniques. | ||
{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;" | |||
|- | |||
| [[image:MDWaferImage.png|300px]] | |||
|- | |||
| colspan="1" style="text-align:center;| | |||
Final chip with DTU logo and the Moby Dick book placed in the center of the circle. The circle is 2000 µm in diameter. | |||
|} | |||
= How it was made = | = How it was made = | ||