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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,834 edits
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'''SEM images of 1.5µm AZ MiR 701 as a function of exposure dose for Aligner: MA6-2 using vacuum contact:'''
 
'''SEM images of 2µm AZ nLOF 2020 as a function of exposure dose for Aligner: MA6-2 using vacuum contact:'''
{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"  
{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"  
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|-style="background:silver; color:black"
|-style="background:silver; color:black"
!
!
!100mJ/cm<sup>2</sup>
!120mJ/cm<sup>2</sup>
!140mJ/cm<sup>2</sup>
!160mJ/cm<sup>2</sup>
!160mJ/cm<sup>2</sup>
!190mJ/cm<sup>2</sup>
!220mJ/cm<sup>2</sup>
!250mJ/cm<sup>2</sup>
!280mJ/cm<sup>2</sup>
|-
|-


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|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|2µm triplets
|2µm triplets
|[[Image:W18 MA62 MiR vac D160_F8T_03.jpg|280px]]
|[[Image:w05_ma6_nLOF_D100_vac_2um.jpg|280px]]
|[[Image:W18 MA62 MiR vac D190_H6B_03.jpg|280px]]
|[[Image:w05_ma6_nLOF_D120_vac_2um.jpg|280px]]
|[[Image:W18 MA62 MiR vac D220_I3T_03.jpg|280px]]
|[[Image:w05_ma6_nLOF_D140_vac_2um.jpg|280px]]
|[[Image:W18 MA62 MiR vac D250_F3T_03.jpg|280px]]
|[[Image:w05_ma6_nLOF_D160_vac_2um.jpg|280px]]
|[[Image:W18 MA62 MiR vac D280_D5B_03.jpg|280px]]
 
|}
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'''SEM images of 2µm AZ nLOF 2020 as a function of exposure dose for Aligner: Maskless 01 (MLA1) using defoc -4:'''
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|-
 
|-
|-style="background:silver; color:black"
!
!200mJ/cm<sup>2</sup>
!220mJ/cm<sup>2</sup>
!240mJ/cm<sup>2</sup>
|-


|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|Lines
|2µm triplets
|[[Image:W18 MA62 MiR vac D160_F8T_02.jpg|280px]]
|[[Image:w04_mla1_nLOF_D200_F-4_2um.jpg|280px]]
|[[Image:W18 MA62 MiR vac D190_H6B_02.jpg|280px]]
|[[Image:w04_mla1_nLOF_D220_F-4_2um.jpg|280px]]
|[[Image:W18 MA62 MiR vac D220_I3T_02.jpg|280px]]
|[[Image:w04_mla1_nLOF_D240_F-4_2um.jpg|280px]]
|[[Image:W18 MA62 MiR vac D250_F3T_02.jpg|280px]]
|[[Image:W18 MA62 MiR vac D280_D5B_02.jpg|280px]]


|}
|}
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'''SEM images of 1.5µm AZ MiR 701 as a function of exposure dose for Aligner: Maskless 02 (MLA2) using defoc 2:'''
 
'''SEM images of 2µm AZ nLOF 2020 as a function of exposure dose for Aligner: Maskless 02 (MLA2) using defoc 0:'''
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{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"  
|-
|-
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|-style="background:silver; color:black"
|-style="background:silver; color:black"
!
!
!225mJ/cm<sup>2</sup>
!400mJ/cm<sup>2</sup>
!275mJ/cm<sup>2</sup>
!450mJ/cm<sup>2</sup>
!325mJ/cm<sup>2</sup>
!500mJ/cm<sup>2</sup>
!375mJ/cm<sup>2</sup>
|-
|-


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|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|2µm triplets
|2µm triplets
|[[Image:W15 MLA2 MiR F2 D225_04.jpg|280px]]
|[[Image:W17 mla2 nLOF D400 F0_01.jpg|280px]]
|[[Image:W15 MLA2 MiR F2 D275_03.jpg|280px]]
|[[Image:W17 mla2 nLOF D450 F0_04.jpg|280px]]
|[[Image:W15 MLA2 MiR F2 D325_03.jpg|280px]]
|[[Image:W17 mla2 nLOF D500 F0_01.jpg|280px]]
|[[Image:W15 MLA2 MiR F2 D375_03.jpg|280px]]
 
|-
|-style="background:WhiteSmoke; color:black"
|Lines
|[[Image:W15 MLA2 MiR F2 D225_01.jpg|280px]]
|[[Image:W15 MLA2 MiR F2 D275_02.jpg|280px]]
|[[Image:W15 MLA2 MiR F2 D325_01.jpg|280px]]
|[[Image:W15 MLA2 MiR F2 D375_01.jpg|280px]]


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====Linewidth and sidewall angle vs defocus parameter (AZ nLOF 2020)====
====Linewidth and sidewall angle vs defocus parameter (AZ nLOF 2020)====
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