Specific Process Knowledge/Lithography/Aligners/MAvsMLA: Difference between revisions
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| colspan="2" | Width of 2µm line and sidewall angle vs. exposure dose for 1.5µm AZ MiR 701. <br>Blue circles: Exposed on Aligner: MA6-2 in vacuum contact. <br>Orange Squares: Exposed on Aligner: Maskless 02 (MLA2) using defoc 2 (QC defoc=2). | | colspan="2" | Width of 2µm line and sidewall angle vs. exposure dose for 1.5µm AZ MiR 701. <br>Blue circles: Exposed on Aligner: MA6-2 in vacuum contact. <br>Orange Squares: Exposed on Aligner: Maskless 02 (MLA2) using defoc 2 (QC defoc=2). | ||
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====Linewidth and sidewall angle vs defocus parameter==== | |||
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'''SEM images of 1.5µm AZ MiR 701 as a function of defocus parameter for Aligner: Maskless 02 (MLA2) using dose 275mJ/cm<sup>2</sup>:''' | |||
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|-style="background:silver; color:black" | |||
! | |||
!Defoc -1 | |||
!Defoc 1 | |||
!Defoc 2 | |||
!Defoc 3 | |||
!Defoc 5 | |||
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|-style="background:WhiteSmoke; color:black" | |||
|2µm triplets | |||
|[[Image:W15 MLA2 MiR F-1 D275_01.jpg|280px]] | |||
|[[Image:W15 MLA2 MiR F1 D275_01.jpg|280px]] | |||
|[[Image:W15 MLA2 MiR F2 D275_03.jpg|280px]] | |||
|[[Image:W15 MLA2 MiR F3 D275_01.jpg|280px]] | |||
|[[Image:W15 MLA2 MiR F5 D275_01.jpg|280px]] | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|Lines | |||
|[[Image:W15 MLA2 MiR F-1 D275_02.jpg|280px]] | |||
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|[[Image:W15 MLA2 MiR F2 D275_02.jpg|280px]] | |||
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|[[Image:W15 MLA2 MiR F5 D275_02.jpg|280px]] | |||
|} | |} | ||
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