Specific Process Knowledge/Lithography/EBeamLithography/Nanobook: Difference between revisions
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| [[File: | | [[File:MobyDickSEM3.png|400px]] | ||
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| colspan="1" style="text-align:center;| | | colspan="1" style="text-align:center;| | ||
SEM image of a small fraction of the book. Letter line width is 31 nm and letter height is about 116 nm. | SEM image of a small fraction of the book. Letter line width is 31 nm and letter height is about 116 nm. | ||
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