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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,794 edits
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==AZ nLOF 2020==
==AZ nLOF 2020==
===Resolution===
===Resolution===
* Table with optimal parameters and resolution for different aligners
<br clear="all" />
* SEM pictures
 
'''Resolution at optimal processing conditions for 2µm AZ nLOF 2020 using different exposure equipment:'''
'''Resolution at optimal processing conditions for 2µm AZ nLOF 2020 using different exposure equipment:'''
{| class="wikitable"
{| class="wikitable"
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