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Specific Process Knowledge/Lithography/Aligners/MAvsMLA: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,794 edits
Line 469: Line 469:
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|Aligner: MA6-2
|Aligner: MA6-2
100mJ/cm<sup>2</sup>, vacuum contact
154mJ/cm<sup>2</sup>, vacuum contact
|[[Image:W14 MA62 5214E vac D100_B4T_01.jpg|400px]]
|[[Image:W07 MA6 nLOF D154 vac C8T_01.jpg|400px]]
|[[Image:W14 MA62 5214E vac D100_B4T_02.jpg|400px]]
|[[Image:W07 MA6 nLOF D154 vac C8T_??.jpg|400px]]
|[[Image:W14 MA62 5214E vac D100_B4T_03.jpg|400px]]
|[[Image:W07 MA6 nLOF D154 vac C8T_??.jpg|400px]]


|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|Aligner: MA6-1
|Aligner: Maskless 01 (MLA1)
100mJ/cm<sup>2</sup>, vacuum contact <br>(probably over-exposed)
220mJ/cm<sup>2</sup>, Defoc -4
|[[Image:W32 PFL 5214 D100 vac C6B_01.jpg|400px]]
|[[Image:W06 MLA1 nLOF D220 F-4_01.jpg|400px]]
|[[Image:W32 PFL 5214 D100 vac C6B_04.jpg|400px]]
|[[Image:W06 MLA1 nLOF D220 F-4_??.jpg|400px]]
|[[Image:W32 PFL 5214 D100 vac C6B_05.jpg|400px]]
|[[Image:W06 MLA1 nLOF D220 F-4_??.jpg|400px]]


|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|Aligner: Maskless 02 (MLA2)
|Aligner: Maskless 02 (MLA2)
90mJ/cm<sup>2</sup>, defoc 2
450mJ/cm<sup>2</sup>, defoc 0
|[[Image:W13 mla2 5214E D90 F2_05.jpg|400px]]
|[[Image:W17 mla2 nLOF D450 F0_04.jpg|400px]]
|[[Image:W13 mla2 5214E D90 F2_01.jpg|400px]]
|[[Image:W17 mla2 nLOF D450 F0_??.jpg|400px]]
|[[Image:W13 mla2 5214E D90 F2_02.jpg|400px]]
|[[Image:W17 mla2 nLOF D450 F0_??.jpg|400px]]


|}
|}
Line 508: Line 508:
|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|Aligner: MA6-1
|Aligner: MA6-2
100mJ/cm<sup>2</sup>, vacuum contact <br>(probably over-exposed)
154mJ/cm<sup>2</sup>, vacuum contact
|[[Image:W32 PFL 5214 D100 vac C6B_02.jpg|400px]]
|[[Image:W07 MA6 nLOF D154 vac C8T_05.jpg|400px]]
|[[Image:W32 PFL 5214 D100 vac C6B_01.jpg|400px]]
|[[Image:W07 MA6 nLOF D154 vac C8T_01.jpg|400px]]
|[[Image:W32 PFL 5214 D100 vac C6B_03.jpg|400px]]
|[[Image:W07 MA6 nLOF D154 vac C8T_02.jpg|400px]]
 
|-
|-style="background:WhiteSmoke; color:black"
|Aligner: Maskless 01 (MLA1)
220mJ/cm<sup>2</sup>, Defoc -4
|[[Image:W06 MLA1 nLOF D220 F-4_02.jpg|400px]]
|[[Image:W06 MLA1 nLOF D220 F-4_01.jpg|400px]]
|[[Image:W06 MLA1 nLOF D220 F-4_03.jpg|400px]]


|}
|}
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