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| ===Resist profile (sidewall angle and linewidth)=== | | ===Resist profile (sidewall angle and linewidth)=== |
| *SEM pictures to support graphs? | | *SEM pictures to support graphs? |
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| [[Image:nLOF_Linewidth vs dose.jpg|left|500px|thumb|Width of 2µm line vs. exposure dose for 2µm AZ nLOF 2020. <br>Blue circles: Exposed on Aligner: MA6-2 in vacuum contact. <br>Orange Squares: Exposed on Aligner: Maskless 01 (MLA1) using defoc -4 (QC defoc=-2). <br>Grey triangles: Exposed on Aligner: Maskless 02 (MLA2) using defoc 0 (QC defoc=2).]]
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| [[Image:nLOF_Sidewall vs dose.jpg|left|500px|thumb|Sidewall angle vs. exposure dose for 2µm AZ nLOF 2020. <br>Blue circles: Exposed on Aligner: MA6-2 in vacuum contact. <br>Orange Squares: Exposed on Aligner: Maskless 01 (MLA1) using defoc -4 (QC defoc=-2). <br>Grey triangles: Exposed on Aligner: Maskless 02 (MLA2) using defoc 0 (QC defoc=2).]]
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| [[Image:nLOF_MLA1_Profile vs defoc.jpg|left|500px|thumb|Linewidth and sidewall angle vs. defocus value for 2µm AZ nLOF exposed in Aligner: Maskless 01 (MLA1) using dose 220mJ/cm<sup>2</sup>. <br>Blue circles: Width of 2µm line. Orange Squares: Sidewall angle.]]
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| [[Image:nLOF_MLA2_Profile vs defoc.jpg|left|500px|thumb|Linewidth and sidewall angle vs. defocus value for 2µm AZ nLOF exposed in Aligner: Maskless 02 (MLA2) using dose 450mJ/cm<sup>2</sup>. <br>Blue circles: Width of 2µm line. Orange Squares: Sidewall angle.]]
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| '''Result of image analysis of SEM images of 2µm triplets:''' | | '''Result of image analysis of SEM images of 2µm triplets:''' |
