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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,655 edits
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===Resist profile (linewidth and sidewall angle)===
===Resist profile (linewidth and sidewall angle)===
'''SEM images of 2µm triplets as a function of exposure dose:'''
'''SEM images of 2µm triplets as a function of exposure dose:'''
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{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"  
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{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"  
{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"  
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'''Result of image analysis of SEM images of 2µm triplets:'''
'''Result of image analysis of SEM images of 2µm triplets:'''
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<br clear="all" />
<br clear="all" />
'''SEM images as a function of defocus parameter for Aligner: Maskless 02 (MLA2):'''
{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"
|-
|-
|-style="background:silver; color:black"
!
!Defoc -8
!Defoc -1
!Defoc 2
!Defoc 5
!Defoc 12
|-
|-
|-style="background:WhiteSmoke; color:black"
|2µm triplets
|[[Image:W14 MA62 5214E vac D85_H6B_01.jpg|280px]]
|[[Image:W14 MA62 5214E vac D90_H4B_01.jpg|280px]]
|[[Image:W14 MA62 5214E vac D95_F3B_01.jpg|280px]]
|[[Image:W14 MA62 5214E vac D100_B4T_01.jpg|280px]]
|[[Image:W14 MA62 5214E vac D105_C6T_01.jpg|280px]]
|-
|-style="background:WhiteSmoke; color:black"
|Lines
|[[Image:W14 MA62 5214E vac D85_H6B_01.jpg|280px]]
|[[Image:W14 MA62 5214E vac D90_H4B_01.jpg|280px]]
|[[Image:W14 MA62 5214E vac D95_F3B_01.jpg|280px]]
|[[Image:W14 MA62 5214E vac D100_B4T_01.jpg|280px]]
|[[Image:W14 MA62 5214E vac D105_C6T_01.jpg|280px]]
|}


{| cellpadding="2" style="border: 2px solid darkgray;" align="left"
{| cellpadding="2" style="border: 2px solid darkgray;" align="left"
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|- align="center"
|- align="center"
| Blue circles: Width of 2µm line. <br>Orange Squares: Sidewall angle.
| Blue circles: Width of 2µm line. <br>Orange Squares: Sidewall angle.
|}
|}
<br clear="all" />
<br clear="all" />


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