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Specific Process Knowledge/Lithography/Aligners/MAvsMLA: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,655 edits
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'''SEM images from different exposure equipment:'''


{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"  
{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"  
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|-style="background:silver; color:black"
|-style="background:silver; color:black"
!
!
!1µm triplets
!2µm triplets
!2µm triplets
!4µm triplets
!Lines
!Lines
!Trenches
!Trenches
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|Aligner: MA6-2
|Aligner: MA6-2
100mJ/cm<sup>2</sup>, vacuum contact
100mJ/cm<sup>2</sup>, vacuum contact
|
|[[Image:W14 MA62 5214E vac D100_B4T_01.jpg|400px]]
|[[Image:W14 MA62 5214E vac D100_B4T_01.jpg|300px]]
|[[Image:W14 MA62 5214E vac D100_B4T_02.jpg|400px]]
|
|[[Image:W14 MA62 5214E vac D100_B4T_03.jpg|400px]]
|[[Image:W14 MA62 5214E vac D100_B4T_02.jpg|300px]]
|[[Image:W14 MA62 5214E vac D100_B4T_03.jpg|300px]]


|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|Aligner: MA6-1
|Aligner: MA6-1
100mJ/cm<sup>2</sup>, vacuum contact
100mJ/cm<sup>2</sup>, vacuum contact <br>(probably over-exposed)
(probably over-exposed)
|[[Image:W32 PFL 5214 D100 vac C6B_01.jpg|400px]]
|[[Image:W32 PFL 5214 D100 vac C6B_02.jpg|290px]]
|[[Image:W32 PFL 5214 D100 vac C6B_04.jpg|400px]]
|[[Image:W32 PFL 5214 D100 vac C6B_01.jpg|290px]]
|[[Image:W32 PFL 5214 D100 vac C6B_05.jpg|400px]]
|[[Image:W32 PFL 5214 D100 vac C6B_03.jpg|290px]]
|[[Image:W32 PFL 5214 D100 vac C6B_04.jpg|290px]]
|[[Image:W32 PFL 5214 D100 vac C6B_05.jpg|290px]]


|-
|-
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|Aligner: Maskless 02 (MLA2)
|Aligner: Maskless 02 (MLA2)
90mJ/cm<sup>2</sup>, defoc 2
90mJ/cm<sup>2</sup>, defoc 2
|
|[[Image:W13 mla2 5214E D90 F2_05.jpg|400px]]
|[[Image:W13 mla2 5214E D90 F2_05.jpg|300px]]
|[[Image:W13 mla2 5214E D90 F2_01.jpg|400px]]
|
|[[Image:W13 mla2 5214E D90 F2_02.jpg|400px]]
|[[Image:W13 mla2 5214E D90 F2_01.jpg|300px]]
|[[Image:W13 mla2 5214E D90 F2_02.jpg|300px]]


|}
|}


'''SEM images of different size structures:'''
{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"
|-
|-
|-style="background:silver; color:black"
!
!1µm triplets
!2µm triplets
!4µm triplets
|-
|-
|-style="background:WhiteSmoke; color:black"
|Aligner: MA6-1
100mJ/cm<sup>2</sup>, vacuum contact <br>(probably over-exposed)
|[[Image:W32 PFL 5214 D100 vac C6B_02.jpg|400px]]
|[[Image:W32 PFL 5214 D100 vac C6B_01.jpg|400px]]
|[[Image:W32 PFL 5214 D100 vac C6B_03.jpg|4050px]]
|}
<br clear="all" />
<br clear="all" />


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