Specific Process Knowledge/Lithography/Aligners/MAvsMLA: Difference between revisions

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 ==AZ 5214E==
 ===Resolution===
-* Table with optimal parameters and resolution for different aligners
-* SEM pictures
 {| class="wikitable"
 |+
@@ Line 174: / Line 173: @@
 ===Resist profile (linewidth and sidewall angle)===
 *SEM pictures to support graphs?
+{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"
+|-
+|-
+|-style="background:silver; color:black"
+!
+!85mJ/cm<sup>2</sup>
+!90mJ/cm<sup>2</sup>
+!95mJ/cm<sup>2</sup>
+!100mJ/cm<sup>2</sup>
+!105mJ/cm<sup>2</sup>
+|-
+|-
+|-style="background:WhiteSmoke; color:black"
+|Aligner: MA6-2
+Vacuum contact
+|[[Image:W14 MA62 5214E vac D85_H6B_01.jpg|250px]]
+|[[Image:W14 MA62 5214E vac D90_H4B_01.jpg|250px]]
+|[[Image:W14 MA62 5214E vac D95_F3B_01.jpg|250px]]
+|[[Image:W14 MA62 5214E vac D100_B4T_01.jpg|250px]]
+|[[Image:W14 MA62 5214E vac D105_C6T_01.jpg|250px]]
+|}
+'''Result of image analysis of SEM images of 2µm triplets:'''
 {| cellpadding="2" style="border: 2px solid darkgray;" align="left"