Specific Process Knowledge/Lithography/Aligners/MAvsMLA: Difference between revisions
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===Yield=== | ===Yield=== | ||
The yield is measured by inspecting all 116 lithographic resolution structures in an optical microscope and recording the smallest resolved dots and lines. | The yield is measured by inspecting all 116 lithographic resolution test structures in an optical microscope and recording the smallest resolved dots and lines. | ||
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