Specific Process Knowledge/Lithography/Aligners/MAvsMLA: Difference between revisions
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| Hard contact <br/>Resolution: 1.58µm average; 0.5µm standard deviation. <br/>Yield at 1.25µm: 48% || Soft contact <br/>Resolution: 2.36µm average; 0.4µm standard deviation. <br/>Yield at 2.5µm: 80% <br/>At dose 92mJ/cm<sup>2</sup>, the average resolution decreases to 1.91µm and the yield increases to 100% || 10µm proximity <br/>Resolution: 2.73µm average; 0.6µm standard deviation. <br/>Yield at 2.5µm: 53% | | Hard contact <br/>Resolution: 1.58µm average; 0.5µm standard deviation. <br/>Yield at 1.25µm: 48% || Soft contact <br/>Resolution: 2.36µm average; 0.4µm standard deviation. <br/>Yield at 2.5µm: 80% <br/>At dose 92mJ/cm<sup>2</sup>, the average resolution decreases to 1.91µm and the yield at 2.5µm increases to 100% || 10µm proximity <br/>Resolution: 2.73µm average; 0.6µm standard deviation. <br/>Yield at 2.5µm: 53% | ||
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