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__TOC__
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=Slides presented at NNUM in Uppsala 2026=
=Mask Aligner vs Maskless Aligner=


[[media:MA6 vs MLA 2026_v09.pdf|'''MA6 vs MLA 2026_v09''']]
Slides presented at NNUM in Uppsala 2026: [[media:MA6 vs MLA 2026_v09.pdf|'''MA6 vs MLA 2026_v09''']]
 
Mask design used in the investigation: [[media:LithoTestAlign_2025_v10.gds|LithoTestAlign_2025_v10.gds]]


=Additional data=
=Additional data=

Revision as of 09:27, 9 June 2026

The content on this page, including all images and pictures, was created by DTU Nanolab staff, unless otherwise stated.

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Mask Aligner vs Maskless Aligner

Slides presented at NNUM in Uppsala 2026: MA6 vs MLA 2026_v09

Mask design used in the investigation: LithoTestAlign_2025_v10.gds

Additional data

THIS PAGE IS UNDER CONSTRUCTION

AZ 5214E

Resolution and yield

  • Table with optimal parameters and resolution for different aligners
  • Wafer maps of:
    • Aligner: Maskless 02 (MLA2)
    • Aligner: MA6-1
    • Aligner: MA6-2 before service
    • Aligner: MA6-2 after service + WEC pressure

Resist profile (sidewall angle and linewidth)

Width of 2µm line vs. exposure dose for 1.5µm AZ 5214E.
Blue circles: Exposed on Aligner: MA6-2 in vacuum contact.
Orange Squares: Exposed on Aligner: Maskless 02 (MLA2) using defoc 2 (QC defoc=2).
Sidewall angle vs. exposure dose for 1.5µm AZ 5214E.
Blue circles: Exposed on Aligner: MA6-2 in vacuum contact.
Orange Squares: Exposed on Aligner: Maskless 02 (MLA2) using defoc 2 (QC defoc=2).
Linewidth and sidewall angle vs. defocus value for 1.5µm AZ 5214E exposed in Aligner: Maskless 02 (MLA2) using dose 95mJ/cm2.
Blue circles: Width of 2µm line. Orange Squares: Sidewall angle.


AZ MiR 701

Resolution

Resist profile (sidewall angle and linewidth)

Width of 2µm line vs. exposure dose for 1.5µm AZ MiR 701.
Blue circles: Exposed on Aligner: MA6-2 in vacuum contact.
Orange Squares: Exposed on Aligner: Maskless 02 (MLA2) using defoc 2 (QC defoc=2).
Sidewall angle vs. exposure dose for 1.5µm AZ MiR 701.
Blue circles: Exposed on Aligner: MA6-2 in vacuum contact.
Orange Squares: Exposed on Aligner: Maskless 02 (MLA2) using defoc 2 (QC defoc=2).
Linewidth and sidewall angle vs. defocus value for 1.5µm AZ MiR 701 exposed in Aligner: Maskless 02 (MLA2) using dose 275mJ/cm2.
Blue circles: Width of 2µm line. Orange Squares: Sidewall angle.


AZ nLOF 2020

Resolution

Resist profile (sidewall angle and linewidth)

Width of 2µm line vs. exposure dose for 2µm AZ nLOF 2020.
Blue circles: Exposed on Aligner: MA6-2 in vacuum contact.
Orange Squares: Exposed on Aligner: Maskless 01 (MLA1) using defoc -4 (QC defoc=-2).
Grey triangles: Exposed on Aligner: Maskless 02 (MLA2) using defoc 0 (QC defoc=2).
Sidewall angle vs. exposure dose for 2µm AZ nLOF 2020.
Blue circles: Exposed on Aligner: MA6-2 in vacuum contact.
Orange Squares: Exposed on Aligner: Maskless 01 (MLA1) using defoc -4 (QC defoc=-2).
Grey triangles: Exposed on Aligner: Maskless 02 (MLA2) using defoc 0 (QC defoc=2).
Linewidth and sidewall angle vs. defocus value for 2µm AZ nLOF exposed in Aligner: Maskless 01 (MLA1) using dose 220mJ/cm2.
Blue circles: Width of 2µm line. Orange Squares: Sidewall angle.
Linewidth and sidewall angle vs. defocus value for 2µm AZ nLOF exposed in Aligner: Maskless 02 (MLA2) using dose 450mJ/cm2.
Blue circles: Width of 2µm line. Orange Squares: Sidewall angle.


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