Specific Process Knowledge/Lithography/Aligners/MAvsMLA: Difference between revisions
| Line 22: | Line 22: | ||
===Resist profile (sidewall angle and linewidth)=== | ===Resist profile (sidewall angle and linewidth)=== | ||
{| cellpadding="2" style="border: 2px solid darkgray;" align="center" | |||
! width="350" | | |||
! width="350" | | |||
|+'''Lithographic result vs. exposure dose. Data by Thomas Anhøj @ DTU Nanolab, 2026.''' | |||
|- border="0" align="center" | |||
|[[Image:5214E_Linewidth vs dose.jpg|450px]] | |||
|[[Image:5214E_Sidewall vs dose.jpg|450px]] | |||
|- align="center" | |||
| Width of 2µm line vs. exposure dose. <br>Blue circles: Exposed on Aligner: MA6-2 in vacuum contact. <br>Orange Squares: Exposed on Aligner: Maskless 02 (MLA2) using defoc 2 (QC defoc=2). || Sidewall angle vs. exposure dose. <br>Blue circles: Exposed on Aligner: MA6-2 in vacuum contact. <br>Orange Squares: Exposed on Aligner: Maskless 02 (MLA2) using defoc 2 (QC defoc=2). | |||
|} | |||
* Aligner: Maskless 02 (MLA2) | * Aligner: Maskless 02 (MLA2) | ||
* Aligner: MA6-2 | * Aligner: MA6-2 | ||
Revision as of 15:36, 8 June 2026
The content on this page, including all images and pictures, was created by DTU Nanolab staff, unless otherwise stated.
Feedback to this page: click here
Slides presented at NNUM in Uppsala 2026
Additional data
THIS PAGE IS UNDER CONSTRUCTION
AZ 5214E
Resolution and yield
- Aligner: Maskless 02 (MLA2)
- Aligner: MA6-2
- Aligner: MA6-1
Resist profile (sidewall angle and linewidth)
|
|
| Width of 2µm line vs. exposure dose. Blue circles: Exposed on Aligner: MA6-2 in vacuum contact. Orange Squares: Exposed on Aligner: Maskless 02 (MLA2) using defoc 2 (QC defoc=2). |
Sidewall angle vs. exposure dose. Blue circles: Exposed on Aligner: MA6-2 in vacuum contact. Orange Squares: Exposed on Aligner: Maskless 02 (MLA2) using defoc 2 (QC defoc=2). |
- Aligner: Maskless 02 (MLA2)
- Aligner: MA6-2
- Aligner: MA6-1
AZ MiR 701
Resolution
Resist profile (sidewall angle and linewidth)
- Aligner: Maskless 02 (MLA2)
- Aligner: MA6-2
AZ nLOF 2020
Resolution
Resist profile (sidewall angle and linewidth)
- Aligner: Maskless 01 (MLA1)
- Aligner: Maskless 02 (MLA2)
- Aligner: MA6-2