Revision as of 09:54, 8 June 2026

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Slides presented at NNUM in Uppsala 2026

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 ==AZ 5214E==
-===Resolution/yield===
+===Resolution / Yield===
-===Linewidth/bias===
+* Aligner: Maskless 02 (MLA2)
+* Aligner: MA6-2
+* Aligner: MA6-1
+===Linewidth / Bias===
+* Aligner: Maskless 02 (MLA2)
+* Aligner: MA6-2
+* Aligner: MA6-1
 ===Sidewall angle===
+* Aligner: Maskless 02 (MLA2)
+* Aligner: MA6-2
+* Aligner: MA6-1
 ==AZ MiR 701==
 ===Resolution===
-===Linewidth/bias===
+===Linewidth / Bias===
+* Aligner: Maskless 02 (MLA2)
+* Aligner: MA6-2
 ===Sidewall angle===
+* Aligner: Maskless 02 (MLA2)
+* Aligner: MA6-2
 ==AZ nLOF 2020==
 ===Resolution===
-===Linewidth/bias===
+===Linewidth / Bias===
+* Aligner: Maskless 01 (MLA1)
+* Aligner: Maskless 02 (MLA2)
+* Aligner: MA6-2
 ===Sidewall angle===
+* Aligner: Maskless 01 (MLA1)
+* Aligner: Maskless 02 (MLA2)
+* Aligner: MA6-2