Specific Process Knowledge/Lithography/Aligners/MAvsMLA: Difference between revisions
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=Additional data= | =Additional data= | ||
<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]] | <span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]] | ||
==AZ 5214E== | ==AZ 5214E== | ||
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==AZ MiR 701== | ==AZ MiR 701== | ||
===Resolution | ===Resolution=== | ||
===Linewidth/bias=== | ===Linewidth/bias=== | ||
===Sidewall angle=== | ===Sidewall angle=== | ||
==AZ nLOF 2020== | ==AZ nLOF 2020== | ||
===Resolution | ===Resolution=== | ||
===Linewidth/bias=== | ===Linewidth/bias=== | ||
===Sidewall angle=== | ===Sidewall angle=== | ||
Revision as of 09:24, 8 June 2026
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Slides presented at NNUM in Uppsala 2026
Additional data
THIS PAGE IS UNDER CONSTRUCTION