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Specific Process Knowledge/Lithography/Aligners/MAvsMLA: Difference between revisions

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=Slides presented at NNUM in Uppsala 2026=
=Slides presented at NNUM in Uppsala 2026=
[[media:MA6 vs MLA 2026_v09.pdf|'''MA6 vs MLA 2026_v09''']]


=Additional data=
=Additional data=

Revision as of 15:38, 4 June 2026

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Slides presented at NNUM in Uppsala 2026

MA6 vs MLA 2026_v09

Additional data

Mask Aligner

Resolution

Linewidth

Sidewall angle

Maskless Aligner

Resolution

Linewidth

Sidewall angle

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