Specific Process Knowledge/Lithography/Aligners/MAvsMLA: Difference between revisions
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=Slides presented at NNUM 2026 in Uppsala= | =Slides presented at NNUM 2026 in Uppsala= | ||
=Additional | =Additional information= | ||
==Mask Aligner== | |||
===Resolution=== | |||
===Linewidth=== | |||
===Sidewall angle=== | |||
==Maskless Aligner== | |||
===Resolution=== | |||
===Linewidth=== | |||
===Sidewall angle=== | |||
Revision as of 11:24, 4 June 2026
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