Specific Process Knowledge/Etch/Wet Aluminium Etch: Difference between revisions

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	Ething of Aluminium can be done either wet or dry. For wet etching please see below on this page. Dry etching can be done either with [[Specific Process Knowledge/Etch/ICP Metal Etcher\|ICP]] using Chlorine chemistry or with [[Specific Process Knowledge/Etch/IBE/IBSD Ionfab 300\|IBE]] by sputtering with Ar ions.		Ething of Aluminium can be done either wet or dry. For wet etching please see below on this page. Dry etching can be done either with the [[Specific Process Knowledge/Etch/ICP Metal Etcher\|ICP Metal Etch]] using Chlorine chemistry or with [[Specific Process Knowledge/Etch/IBE/IBSD Ionfab 300\|IBE]] by sputtering with Ar ions.