Specific Process Knowledge/Thermal Process/Resist Pyrolysis furnace/Acceptance test: Difference between revisions
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==Multipurpose Anneal furnace acceptance test== | ==Multipurpose Anneal furnace acceptance test== | ||
The acceptance for the Multipurpose Anneal furnace was performed in | The acceptance for the Multipurpose Anneal furnace was performed in January 2015 by ATV Technologie and DTU Nanolab. | ||
At the acceptance test a dry oxide layer was grown on a boat of 150 mm wafers. The oxide growth was repeated three times. | At the acceptance test a dry oxide layer was grown on a boat of 150 mm wafers. The oxide growth was repeated three times. | ||