Specific Process Knowledge/Thermal Process/Furnace: Multipurpose annealing: Difference between revisions
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==The Resist Pyrolysis furnace== | ==The Resist Pyrolysis furnace== | ||
[[Image:ATV_ovn.jpg|thumb|365x365px| | [[Image:ATV_ovn.jpg|thumb|365x365px|Resist Pyrosysis furnace. Positioned in cleanroom B-1. Photo: DTU Nanolab internal]] | ||
[[Image:ATV_ovn_boat.jpg|thumb|335x335px|Boat with wafers for the | [[Image:ATV_ovn_boat.jpg|thumb|335x335px|Boat with wafers for the Resist Pyrolysis furnace. Photo: DTU Nanolab internal]] | ||
The Resist Pyrolysis furnace it made by ATV Technologie, and it was installed in the cleanroom in November 2014. | The Resist Pyrolysis furnace it made by ATV Technologie, and it was installed in the cleanroom in November 2014. | ||