Specific Process Knowledge/Thermal Process/Furnace: Multipurpose annealing: Difference between revisions
Appearance
No edit summary |
|||
| Line 51: | Line 51: | ||
*Oxidation: look at the [[Specific Process Knowledge/Thermal Process/Oxidation|Oxidation]] page | *Oxidation: look at the [[Specific Process Knowledge/Thermal Process/Oxidation|Oxidation]] page | ||
*Annealing: look at the [[Specific Process Knowledge/Thermal Process/Annealing|Annealing]] page | *Annealing: look at the [[Specific Process Knowledge/Thermal Process/Annealing|Annealing]] page | ||
*[[Specific_Process_Knowledge/Thermal_Process/Furnace:_Multipurpose_annealing/Acceptance test|Results from the | *[[Specific_Process_Knowledge/Thermal_Process/Furnace:_Multipurpose_annealing/Acceptance test|Results from the Resist Pyrolysis furnace acceptance test]] | ||
*[[Specific_Process_Knowledge/Thermal_Process/Pyrolysis/Pyrolysis_with_Multipurpose_Anneal_Furnace|Pyrolysis]] | *[[Specific_Process_Knowledge/Thermal_Process/Pyrolysis/Pyrolysis_with_Multipurpose_Anneal_Furnace|Pyrolysis]] | ||