Specific Process Knowledge/Thermal Process/Furnace: Multipurpose annealing: Difference between revisions
No edit summary |
No edit summary |
||
| Line 11: | Line 11: | ||
[[Category: Furnaces|A2]] | [[Category: Furnaces|A2]] | ||
==The | ==The Resist Pyrolysis furnace== | ||
[[Image:ATV_ovn.jpg|thumb|365x365px|Multipurpose Annealing Furnace. Positioned in cleanroom B-1. Photo: DTU Nanolab internal]] | [[Image:ATV_ovn.jpg|thumb|365x365px|Multipurpose Annealing Furnace. Positioned in cleanroom B-1. Photo: DTU Nanolab internal]] | ||