Specific Process Knowledge/Etch/Etching of Chromium: Difference between revisions

@@ Line 168: / Line 168: @@
 |
 Smaller pieces glued to carrier wafer
-*<nowiki>#</nowiki>1 50mm wafer
+* 50mm wafer
-*<nowiki>#</nowiki>1 100mm wafer
+* 100mm wafer
-*<nowiki>#</nowiki>1 150mm wafer
+* 150mm wafer
-*<nowiki>#</nowiki>1 200mm wafer
+* 200mm wafer
 |
 * 150mm wafer
@@ Line 205: / Line 205: @@
 *Polymers
 *Capton tape
+|
+* Silicon
+* Silicon oxides
+* Silicon nitrides
+* Thin layers of Cr, TaO2
 |-
 |}