Specific Process Knowledge/Lithography/Development/UV developer: Difference between revisions
No edit summary |
|||
| Line 78: | Line 78: | ||
1-25 | 1-25 | ||
|- | |- | ||
!style="background:silver; color:black;" width="60"|Media flow rates | |||
|style="background:LightGrey; color:black"| | |||
|style="background:WhiteSmoke; color:black"| | |||
*AZ 726 MIF (TMAH): 300 ml/min | |||
*Process DI water: 400 ml/min | |||
*Backside rinse DI water: 140 ml/min | |||
*Process Nitrogen: 20 l/min | |||
|- | |||
|} | |} | ||
<br clear="all" /> | <br clear="all" /> | ||