Specific Process Knowledge/Lithography/UVLithography: Difference between revisions
No edit summary |
|||
| Line 20: | Line 20: | ||
DTU Nanolab offers a number of automatic and manual coaters, mask or maskless exposure tools, as well as automatic or semi-automatic developers.<br clear=all /> | DTU Nanolab offers a number of automatic and manual coaters, mask or maskless exposure tools, as well as automatic or semi-automatic developers.<br clear=all /> | ||
=Getting started= | =Getting started with UV lithography= | ||
[[File:UVLPic1.png|450px|right]] | [[File:UVLPic1.png|450px|right]] | ||