Jump to content

Specific Process Knowledge/Etch/Wet III-V Etches: Difference between revisions

Mbec (talk | contribs)
No edit summary
Mbec (talk | contribs)
No edit summary
Line 10: Line 10:
<br>
<br>
It is very important that you dispose off chemicals and process waste according to DTU Nanolab regulations and risk assessments for your work.
It is very important that you dispose off chemicals and process waste according to DTU Nanolab regulations and risk assessments for your work.
'''For the GaAs and InP waste you should collect the waste due to it is Carcinogenic. If it contains H2O2 use empty H2O2 bottles (since they should have a special lid that avoid over pressure).
 
'''For the GaAs and InP waste you should collect the waste and mark it Carcinogenic. If it contains H2O2 use empty H2O2 bottles (since they should have a special lid that avoid over pressure).
Remember to mark the bottle that it contains GaAs and InP and that it is carcinogenic.'''
Remember to mark the bottle that it contains GaAs and InP and that it is carcinogenic.'''
[[Image:FH07.jpg|300x300px|right|thumb|'Fume hood 07' in cleanroom D3]]
[[Image:FH07.jpg|300x300px|right|thumb|'Fume hood 07' in cleanroom D3]]