Specific Process Knowledge/Etch/Wet III-V Etches: Difference between revisions
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It is very important that you dispose off chemicals and process waste according to DTU Nanolab regulations and risk assessments for your work. | It is very important that you dispose off chemicals and process waste according to DTU Nanolab regulations and risk assessments for your work. | ||
'''For the GaAs and InP waste you should collect the waste | |||
'''For the GaAs and InP waste you should collect the waste and mark it Carcinogenic. If it contains H2O2 use empty H2O2 bottles (since they should have a special lid that avoid over pressure). | |||
Remember to mark the bottle that it contains GaAs and InP and that it is carcinogenic.''' | Remember to mark the bottle that it contains GaAs and InP and that it is carcinogenic.''' | ||
[[Image:FH07.jpg|300x300px|right|thumb|'Fume hood 07' in cleanroom D3]] | [[Image:FH07.jpg|300x300px|right|thumb|'Fume hood 07' in cleanroom D3]] | ||