Specific Process Knowledge/Lithography/Development/manualTMAH developer: Difference between revisions
Appearance
No edit summary |
|||
| Line 90: | Line 90: | ||
'''Multi puddle'''<br> | '''Multi puddle'''<br> | ||
Multi puddle recipes repeat steps 2-4 for the given number of puddles. | |||
==Process recipes== | ==Process recipes== | ||