Specific Process Knowledge/Lithography/Development/manualTMAH developer: Difference between revisions
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#Dry substrate and chamber with nitrogen | #Dry substrate and chamber with nitrogen | ||
'''User manual'''<br> | |||
Multipuddle recipes repeat steps 2-4 for the given number of puddles. | Multipuddle recipes repeat steps 2-4 for the given number of puddles. | ||
==Process recipes== | ==Process recipes== | ||
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| colspan="2"|AZ 726 MIF (2.38% TMAH) | | colspan="2"|AZ 726 MIF (2.38% TMAH) | ||
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<br clear="all" /> | <br clear="all"/> | ||