Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions
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When aligning on Aligner: Maskless 01, you should either: | When aligning on Aligner: Maskless 01, you should either: | ||
* Use only 2 alignment marks and apply rotation correction | * Use only 2 alignment marks and apply rotation correction (for patterns printed on MLA1) | ||
* Use 3+ alignment marks and apply all corrections | * Use 3+ alignment marks and apply all corrections: rotation, scaling and shearing (for patterns printed on other tools) | ||
<span style="color:red">If 3+ marks are used, but scaling and shearing is not applied, ''significant'' misalignment will be observed, even on chips. On a 4" wafer the shift in Y can be several hundred µm.</span> | <span style="color:red">If 3+ marks are used, but scaling and shearing is not applied, ''significant'' misalignment will be observed, even on chips. On a 4" wafer the shift in Y can be several hundred µm.</span> | ||