Specific Process Knowledge/Lithography/Resist/UVresist: Difference between revisions
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==Process flow examples== | |||
Comparison of specifications and feature space of the standard UV photoresists available at DTU Nanolab. | Comparison of specifications and feature space of the standard UV photoresists available at DTU Nanolab. | ||
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NB! Most of the process knowledge about SU-8 is based in research groups | NB! Most of the process knowledge about SU-8 is based in research groups | ||
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