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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
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===Aligner: MA6-1===
===Aligner: MA6-1===
The Aligner: MA6-1 has an i-line notch filter installed. This results in an exposure light peak around 365 nm with a FWHM of 7 nm.
The Aligner: MA6-1 has an i-line notch filter installed. This produces an exposure light peak around 365 nm with a FWHM of 7 nm.


{|border="1" cellspacing="1" cellpadding="10" style="text-align:left;"  
'''Quality control'''<br>
Please note that the values listed in the table are <i>'''not'''</i> routinely tested as part of quality control.
 
{| class="wikitable"
|-
|-
 
!  !! Date !! Operator !! Film thickness !! Exposure mode !! Dose !! Resolution !! Comments
|-
|-
|-style="background:silver; color:black"
! scope=row| AZ MIR 701
|
| Long ago || ? || 1.5 µm || ? || 180 mJ/cm<sup>2</sup> || ? µm || '''Not under regular quality control'''<br><br>Post exposure bake: 60 s @ 110°C<br>Development: 60 s puddle
!Date
!Thickness
!Dose
!Development
!Comments
|-
|-
 
! scope=row| AZ MIR 701
| Long ago || ? || 2.0 µm || ? || 200 mJ/cm<sup>2</sup> || ? µm || '''Not under regular quality control'''<br><br>Post exposure bake: 60 s @ 110°C<br>Development: 60 s puddle
|-
|-
|-style="background:WhiteSmoke; color:black"
! scope=row| AZ MIR 701
!rowspan="3"|AZ 5214E<br><span style="color:red">Data from discontinued German version</span>
| Long ago || ? || 4.0 µm || ? || 400 mJ/cm<sup>2</sup> || ? µm || '''Not under regular quality control'''<br><br>Post exposure bake: 60 s @ 110°C<br>Development: 60 s puddle
|Long ago
|1.5 µm
|72 mJ/cm<sup>2</sup>
|rowspan="3"|Single puddle, 60 s
|rowspan="3"|Positive process
|-style="background:WhiteSmoke; color:black"
|Long ago
|2.2 µm
|80 mJ/cm<sup>2</sup>
|-style="background:WhiteSmoke; color:black"
|Long ago
|4.2 µm
|160 mJ/cm<sup>2</sup>
|-
|-
 
! scope=row| AZ 5214E
| Long ago || ? || 1.5 µm || ? || 72 mJ/cm<sup>2</sup> || ? µm || '''Not under regular quality control'''<br><br>Development: 60 s puddle
|-
|-
|-style="background:LightGrey; color:black"
! scope=row| AZ 5214E
!AZ 4562<br><span style="color:red">Data from discontinued German version</span>
| Long ago || ? || 2.2 µm || ? || 80 mJ/cm<sup>2</sup> || ? µm || '''Not under regular quality control'''<br><br>Development: 60 s puddle
|Long ago
|10 µm
|510 mJ/cm<sup>2</sup>
|Multiple puddle, 4 x 60 s
|Multiple exposure with 10-15 s pauses is recommended.
|-
|-
 
! scope=row| AZ 5214E
| Long ago || ? || 4.2 µm || ? || 160 mJ/cm<sup>2</sup> || ? µm || '''Not under regular quality control'''<br><br>Development: 60 s puddle
|-
|-
|-style="background:WhiteSmoke; color:black"
! scope=row| AZ 5214E<br>Image reversal
!rowspan="3"|AZ MiR 701<br><span style="color:red">Data from discontinued PFOA containing version</span>
| Long ago || ? || 2.2 µm || ? || ? mJ/cm<sup>2</sup> || ? µm || '''Not under regular quality control'''<br><br>Reversal bake: 60 s @ 110°C<br>Flood exposure: 500 mJ/cm<sup>2</sup><br>Development: 60 s puddle
|Long ago
|1 µm
|180 mJ/cm<sup>2</sup>
|Single puddle, 60 s
|rowspan="2"|PEB: 60 s at 110°C
|-style="background:WhiteSmoke; color:black"
|Long ago
|2 µm
|200 mJ/cm<sup>2</sup>
|Single puddle, 60 s
|-style="background:WhiteSmoke; color:black"
|Long ago
|4 µm
|400 mJ/cm<sup>2</sup>
|Single puddle, 60 s
|rowspan="1"|PEB: 90 s at 110°C
|-
|-
 
! scope=row| AZ nLOF 2020
| Long ago || ? || 2.0 µm || ? || 121 mJ/cm<sup>2</sup> || ? µm || '''Not under regular quality control'''<br><br>Post exposure bake: 60 s @ 110°C<br>Development: 60 s puddle<br><br>Side wall angle: ~15°<br>For smaller angle (~5°): develop 30 seconds instead
|-
|-
|-style="background:LightGrey; color:black"
! scope=row| AZ 4562
!AZ nLOF 2020
| Long ago || ? || 10 µm || ? || 510 mJ/cm<sup>2</sup> || ≤5 µm || '''Not under regular quality control'''<br><br>Priming: HMDS<BR>Rehydration after SB: none<br>Exposure: Multiple exposures with 15 s pauses is recommended<br>Degassing after exposure: none<br>Development: 5 x 60 s multi puddle
|Long ago
|}
|2 µm
|110 mJ/cm<sup>2</sup>
|Single puddle, 60 s
|PEB: 60 s at 110°C
Side wall angle ~15°


For smaller angle (~5°), develop 30 seconds instead
'''New resists version in 2023'''<br>
|}
As of 2023-03-21 we no longer have any of the old versions of the resists: AZ 5214E, AZ 4562, AZ MiR 701. This table contains only information about the <i>old</i> resist versions.


<br clear="all" />


===Aligner: MA6-2===
===Aligner: MA6-2===
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