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Specific Process Knowledge/Etch/III-V RIE: Difference between revisions

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'''''Unless otherwise stated, this page is written by DTU Nanolab internal'''''
'''''Unless otherwise stated, this page is written by DTU Nanolab internal'''''


<blockquote>This tool is expected to be decommissioned soon - please ask the dryetch group for alternatives.</blockquote>
<blockquote><span style="background:#ff0000"> This tool has been decommissioned - please ask the dryetch group for alternatives.</span></blockquote>


==III-V RIE Plassys==
==III-V RIE Plassys==
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/III-V_RIE"