Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions
| Line 138: | Line 138: | ||
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! Temperature (<sup>o</sup>C) | ! Temperature (<sup>o</sup>C) | ||
| 50 (no back side cooling | | 50 (no back side cooling) | ||
|- | |- | ||
! Spacers (mm) | ! Spacers (mm) | ||