Revision as of 09:23, 10 October 2025

DTU Nanolab - Building 346/347

DTU Nanolab has several locations on the Lyngby campus, building 346/347 and 314/307.

Buildings 346 and 347 (formerly know as DTU Danchip) hosts the cleanroom and related offices, as well as the PolyFabLab and SupportLab (photo).

Buildings 314 and 307 (formerly know as DTU CEN) hosts most of the electron microscopes (SEMs and TEMs), and related offices together with some labs, and preparation equipment. More information about our electron microscopy characterization cababilities can be found here.

Building 346:

Ground Floor: Cleanroom
First Floor: Several spedcial Labs (e.g. Wet Chemistry Lab, Phoenix Lab) and Fabrication and Characterization equipment (e.g. Dicing Tools, SEM TableTop)
Basement: Fabrication and Characterization equipment (e.g. Hot Embosser, Laser Micromachining Tool, XRD Anode, AFM, XPS, SEM1)

Building 347:

Ground Floor: DTU Nanolab Administration, PolyFabLab, SupportLab (previously PackLab), PDMS Lab
First Floor: Offices, Lunch Room
Basement: Several spedcial Labs (e.g. Optics Lab, Plasma Lab, Physics Lab)

Please note, due to reconstruction, upgrades, purchases, decommision of equipment or for other reasons, equipment may be moved from the location specified below. Please have a look at www.labmanager.dk under "Basic Info" and "Location" for an updated location.

Cleanroom (Ground Floor in B346) - Layout and Phones


Drawing: DTU CAS Digital

Room number	Location	Phone number
A-1	At III-V RIE	452 55804
Ax2	At the Lesker	452 55815
A-5	In the corner near the furnace/plasma asher	452 55803
B-1	In the corridor, on the wall	452 55806
C-1	In the corridor, on the wall	452 55808
D-1	In the gowning area (entrance room)	452 55703
D-3	At the KOH	452 55940
E-1	By the e-beam computers	452 55943
E-4	By the mask aligner	452 55946
E-5/E-4	Between the MLAs	452 55945
E-6	Furnace 6"	452 55948
F-1	III-V growth	452 55949
F-2	To the right of the XRD and Ellipsometer	452 55941
F-3	DUV Stepper	452 55947
Basement 901	Hot Embosser, XRD RotAnode, Laser Micromachining Tool	452 55812
Basement 904	To the right of the AFM	452 55813

Basement Labs (Basement in B346) - Layout and Phones

PolyFabLab and SupportLab (Ground Floor in B347) - Layout and Phones

@@ Line 102: / Line 102: @@
 |-
 |-style="background:WhiteSmoke; color:black"
-!E-5/E-4
+!E-4
-|By the MLAs in E-5, by mask aligner in E-4
+|By the mask aligner
 |452 55946
 |-
@@ Line 109: / Line 109: @@
 |-
 |-style="background:LightGrey; color:black"
+!E-5/E-4
+|Between the MLAs
+|452 55945
+|-
+|-
+|-style="background:WhiteSmoke; color:black"
 !E-6
 |Furnace 6"
@@ Line 114: / Line 121: @@
 |-
 |-
-|-style="background:WhiteSmoke; color:black"
+|-style="background:LightGrey; color:black"
 !F-1
 |III-V growth
@@ Line 121: / Line 128: @@
 |-
-|-style="background:LightGrey; color:black"
+|-style="background:WhiteSmoke; color:black"
 !F-2
 |To the right of the XRD and Ellipsometer
@@ Line 127: / Line 134: @@
 |-
 |-
-|-style="background:WhiteSmoke; color:black"
+|-style="background:LightGrey; color:black"
 !F-3
 |DUV Stepper
@@ Line 134: / Line 141: @@
 |-
-|-style="background:LightGrey; color:black"
+|-style="background:WhiteSmoke; color:black"
 !Basement 901
 |Hot Embosser, XRD RotAnode, Laser Micromachining Tool
 |452 55812
 |-
-|-style="background:WhiteSmoke; color:black"
+|-style="background:LightGrey; color:black"
 !Basement 904
 |To the right of the AFM