Specific Process Knowledge/Etch/Wet III-V Etches: Difference between revisions
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==More info regarding etching of III-V materials== | ==More info regarding etching of III-V materials== | ||
More info on etching of III-V materials (not Nanolab wiki) can be found here: | More info on etching of III-V materials (not the DTU Nanolab wiki) can be found here: | ||
https://wiki.nanofab.ucsb.edu/wiki/Wet_Etching_Recipes | https://wiki.nanofab.ucsb.edu/wiki/Wet_Etching_Recipes '''(at the UCSB Nanofab Wiki)''' | ||
and | and | ||
https://www.sciencedirect.com/science/article/pii/S0927796X00000279 | https://www.sciencedirect.com/science/article/pii/S0927796X00000279 '''(at the UCSB Nanofab Wiki)''' | ||